Sonderforschungsbereich 481: Publikationen: Depth Profiling of Lamella-Forming Block ...

Max, E.; Hund, M.; Tsarkova, L.: Depth Profiling of Lamella-Forming Block Copolymer Films using quasi in-situ SFM Design , PMSE Preprints, 99, 689-690 (2008)

Abstract:
State-of-the-art scanning force microscopes (SFM) have limited in-situ sample treatment capabilities. Aggressive treatments like plasma etching or etching in aggressive liquids typically require removing the sample from the microscope. In consequence, time consuming procedures are needed if the same spot of the sample has to be imaged after the step-wise treatment. We report a first prototype of an SPM setup with quasi in-situ sample treatment capabilities which utilizes a modified commercial SPM (Dimension 3100, Veeco Instruments Inc.) and present first experiments using this approach. The new development concerns the possibility to reposition the SFM tip on the specific sample spot after successive treatments performed inside the SFM. Thin lamella-forming block copolymer films have been subjected to consecutive plasma etching, and the structure-depth profile has been reconstructed. Our results complement the understanding of the substrate-induced phase transitions. In combination with the floating/pealing of the films from the solid substrate, both the profiling from bottom to top and the investigation of the wetting layer on the substrate were performed. This kind of experiments revealed a complex (non-uniform) structure of the lamella layer next to the substrate.

Sonderforschungsbereich 481

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