Sonderforschungsbereich 481

    Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern

Subproject A6:

Development of organic materials for photoresist systems – optimization using combinatorial techniques

Prof. Hans-Werner Schmidt (Macromolecular Chemistry I)
Prof. Peter Strohriegl (Macromolecular Chemistry I)

The project A6 focuses on preparation and patterning of layers with defined functions. Along with the synthesis of new monomers and polymers, the main focus of this research project is the development and use of combinatorial techniques for efficient optimization. In this context, new rod-like polyimides were synthesized and aligned by different fabrication pathways. The alignment layers of the rod-like polyimides results in an improved orientation behavior of liquid crystals. Geared to long-term profitability, the research project focuses additionally on the establishment and further development of combinatorial technique and analysis for thin layer devices and pattern of photoresists.

Photo patterning research of organic materials is done in cooperation with Christopher K. Ober (Cornell University).
Combinatorial library to investigate pattern resolution by fabricating various photoresist material compositions (sector A-J) and by systematically increasing exposure dose in each sector. The optical microscopic image shows patterns of the optimized sector C3.


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